Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9171718 | Method of epitaxial germanium tin alloy surface preparation | Errol Antonio C. Sanchez | 2015-10-27 |
| 9082684 | Method of epitaxial doped germanium tin alloy formation | Errol Antonio C. Sanchez | 2015-07-14 |
| 9029264 | Methods for depositing a tin-containing layer on a substrate | Errol Antonio C. Sanchez | 2015-05-12 |
| 8999821 | Fin formation by epitaxial deposition | Adam Brand, Bingxi Wood, Errol Antonio C. Sanchez, Yihwan Kim, John Boland | 2015-04-07 |
| 8877651 | Semiconductor device and manufacturing method involving multilayer contact etch stop | Qiuhua Han, Xinpeng Wang | 2014-11-04 |
| 8822312 | Method of forming high growth rate, low resistivity germanium film on silicon substrate | Errol Antonio C. Sanchez, Xianzhi Tao | 2014-09-02 |
| 8759201 | Method of forming high growth rate, low resistivity germanium film on silicon substrate | Errol Antonio C. Sanchez, Xianzhi Tao | 2014-06-24 |
| 8748248 | Semiconductor device including contact holes and method for forming the same | Xinpeng Wang | 2014-06-10 |
| 8669590 | Methods and apparatus for forming silicon germanium-carbon semiconductor structures | Errol Antonio C. Sanchez | 2014-03-11 |
| 8658540 | Methods for low temperature conditioning of process chambers | David K. Carlson, Errol Antonio C. Sanchez, Zhiyuan Ye | 2014-02-25 |
| 8652951 | Selective epitaxial germanium growth on silicon-trench fill and in situ doping | Jiping Li, Miao Jin, Bingxi Wood, Errol Antonio C. Sanchez, Yihwan Kim | 2014-02-18 |
| 8647439 | Method of epitaxial germanium tin alloy surface preparation | Errol Antonio C. Sanchez | 2014-02-11 |
| 8501600 | Methods for depositing germanium-containing layers | Errol Antonio C. Sanchez, David K. Carlson | 2013-08-06 |
| 8501594 | Methods for forming silicon germanium layers | Masato Ishii, Errol Antonio C. Sanchez | 2013-08-06 |
| 8043907 | Atomic layer deposition processes for non-volatile memory devices | Yi Ma, Shreyas Kher, Khaled Ahmed, Tejal Goyani, Maitreyee Mahajani +1 more | 2011-10-25 |
| 7921803 | Chamber components with increased pyrometry visibility | Joseph Yudovsky, Brendan McDougall, Ravi Jallepally, Maitreyee Mahajani, Kevin Griffin +1 more | 2011-04-12 |
| 7897208 | Low temperature ALD SiO2 | Maitreyee Mahajani, Brendan McDougall | 2011-03-01 |
| 7749574 | Low temperature ALD SiO2 | Maitreyee Mahajani, Brendan McDougall | 2010-07-06 |
| 7659158 | Atomic layer deposition processes for non-volatile memory devices | Yi Ma, Shreyas Kher, Khaled Ahmed, Tejal Goyani, Maitreyee Mahajani +1 more | 2010-02-09 |
| 7572052 | Method for monitoring and calibrating temperature in semiconductor processing chambers | Jallepally Ravi, Maitreyee Mahajani | 2009-08-11 |