Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7780793 | Passivation layer formation by plasma clean process to reduce native oxide growth | Haichun Yang, Chien-Teh Kao, Mei Chang | 2010-08-24 |
| 7767024 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2010-08-03 |
| 7709385 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Ken Kaung Lai +1 more | 2010-05-04 |
| 7695563 | Pulsed deposition process for tungsten nucleation | Ping Jian, Jong Hyun Yoo, Ken Kaung Lai, Alfred Mak, Robert Jackson +1 more | 2010-04-13 |
| 7550381 | Contact clean by remote plasma and repair of silicide surface | Chien-Teh Kao, Chiukin Lai, Mei Chang | 2009-06-23 |
| 7520957 | Lid assembly for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2009-04-21 |
| 7494545 | Epitaxial deposition process and apparatus | Andrew Lam, Yihwan Kim, Satheesh Kuppurao, See-Eng Phan, Chien-Teh Kao | 2009-02-24 |
| 7465665 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Ken Kaung Lai +1 more | 2008-12-16 |
| 7396480 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2008-07-08 |
| 7220673 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Ken Kaung Lai +1 more | 2007-05-22 |
| 7211144 | Pulsed nucleation deposition of tungsten layers | Ping Jian, Jong Hyun Yoo, Ken Kaung Lai, Alfred Mak, Robert Jackson +1 more | 2007-05-01 |
| 7101795 | Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Ken Kaung Lai +1 more | 2006-09-05 |