Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613691 | Highly selective oxide etch process using hexafluorobutadiene | Raymond Hung, Joseph P. Caulfield, Hongching Shan, Gerald Yin | 2003-09-02 |
| 6602434 | Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Gerald Yin | 2003-08-05 |
| 6521566 | Mixed oxide solid solutions | Scott A. Magno, Eric G. Derouane | 2003-02-18 |
| 6489248 | Method and apparatus for etch passivating and etching a substrate | Luke Zhang, Ida Ariani Adisaputro, Kwang Soo Kim | 2002-12-03 |
| 6432318 | Dielectric etch process reducing striations and maintaining critical dimensions | Ji Ding, Hidehiro Kojiri, Yoshio Ishikawa, Keiji Horioka, Robert Wu +1 more | 2002-08-13 |
| 6403491 | Etch method using a dielectric etch chamber with expanded process window | Jingbao Liu, Judy Wang, Takehiko Komatsu, Bryan Pu, Kenny L. Doan +4 more | 2002-06-11 |
| 6387287 | Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Gerald Yin | 2002-05-14 |
| 6361705 | Plasma process for selectively etching oxide using fluoropropane or fluoropropylene | Gerald Yin, Hao Lu, Robert Wu, Jian Ding | 2002-03-26 |
| 6291357 | Method and apparatus for etching a substrate with reduced microloading | Luke Zhang, Ida Ariani Adisaputro, Kwang Soo Kim | 2001-09-18 |
| 6183655 | Tunable process for selectively etching oxide using fluoropropylene and a hydrofluorocarbon | Gerald Yin, Robert Wu, Jian Ding | 2001-02-06 |
| 6174451 | Oxide etch process using hexafluorobutadiene and related unsaturated hydrofluorocarbons | Raymond Hung, Joseph P. Caulfield, Hongching Shan, Gerald Yin | 2001-01-16 |
| 6074959 | Method manifesting a wide process window and using hexafluoropropane or other hydrofluoropropanes to selectively etch oxide | Gerald Yin, Robert Wu, Jian Ding | 2000-06-13 |
| 5837058 | High temperature susceptor | Steven Chen, Ming Xi | 1998-11-17 |