Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489248 | Method and apparatus for etch passivating and etching a substrate | Luke Zhang, Ruiping Wang, Kwang Soo Kim | 2002-12-03 |
| 6291357 | Method and apparatus for etching a substrate with reduced microloading | Luke Zhang, Ruiping Wang, Kwang Soo Kim | 2001-09-18 |