Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515927 | Methods and apparatus for semiconductor package processing | Prayudi Lianto, Guan Huei See, Arvind Sundarrajan, Ranga Rao Arnepalli | 2019-12-24 |
| 10497573 | Selective atomic layer etching of semiconductor materials | Fei Wang, Geetika Bajaj, Nitin K. Ingle, Zihui Li, Robert Jan Visser +1 more | 2019-12-03 |
| 10407789 | Uniform crack-free aluminum deposition by two step aluminum electroplating process | Balaji Ganapathy, Ankur Kadam, Laksheswar Kalita, Tapash Chakraborty, Vijay Bhan Sharma | 2019-09-10 |
| 10319601 | Slurry for polishing of integrated circuit packaging | Ranga Rao Arnepalli, Prayudi Lianto, Jie Zeng, Arvind Sundarrajan, Robert Jan Visser +1 more | 2019-06-11 |
| 10280507 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Pramit Manna, Robert Jan Visser +1 more | 2019-05-07 |
| 10273577 | Low vapor pressure aerosol-assisted CVD | Ranga Rao Arnepalli, Nilesh Chimanrao Bagul, Robert Jan Visser | 2019-04-30 |
| 10253406 | Method for forming yttrium oxide on semiconductor processing equipment | Laksheswar Kalita, Geetika Bajaj, Yogita Pareek, Yixing Lin, Dmitry Lubomirsky +4 more | 2019-04-09 |
| 10233554 | Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment | Yogita Pareek, Laksheswar Kalita, Geetika Bajaj, Kevin A. PAPKE, Ankur Kadam +3 more | 2019-03-19 |
| 10177002 | Methods for chemical etching of silicon | Geetika Bajaj, Ravindra Patil, Robert Jan Visser | 2019-01-08 |
| 10163629 | Low vapor pressure aerosol-assisted CVD | Ranga Rao Arnepalli, Nilesh Chimanrao Bagul, Robert Jan Visser | 2018-12-25 |
| 10074559 | Selective poreseal deposition prevention and residue removal using SAM | Geetika Bajaj, Tapash Chakraborty, Robert Jan Visser, Bhaskar Kumar, Deenesh Padhi | 2018-09-11 |
| 10043684 | Self-limiting atomic thermal etching systems and methods | Ranga Rao Arnepalli, Robert Jan Visser, Nitin K. Ingle, Mikhail Korolik, Jayeeta Biswas +1 more | 2018-08-07 |
| 10017856 | Flowable gapfill using solvents | Ranga Rao Arnepalli, Darshan Thakare, Abhijit Basu Mallick, Pramit Manna, Robert Jan Visser +1 more | 2018-07-10 |
| 9991129 | Selective etching of amorphous silicon over epitaxial silicon | Geetika Bajaj, Robert Jan Visser | 2018-06-05 |
| 9903020 | Generation of compact alumina passivation layers on aluminum plasma equipment components | Sung Je Kim, Laksheswar Kalita, Yogita Pareek, Ankur Kadam, Bipin Thakur +1 more | 2018-02-27 |
| 9780250 | Self-aligned mask for ion implantation | Vikram M. Bhosle, Timothy J. Miller, Tapash Chakraborty, Robert Jan Visser | 2017-10-03 |
| 9673042 | Methods and apparatus for in-situ cleaning of copper surfaces and deposition and removal of self-assembled monolayers | Robert Jan Visser, Ranga Rao Arnepalli | 2017-06-06 |