Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371285 | Motorized chamber lid | Alex Shenderovich, Marc Schweitzer, Ilya Lavitsky, Alvin Lau, Michael Feltsman | 2008-05-13 |
| 7148435 | Build-in LOTO device on equipment breaker panel | Allen Lau, Carl Johnson, Sharon Niehoff | 2006-12-12 |
| 7097744 | Method and apparatus for controlling darkspace gap in a chamber | Alan Liu, Marc Schweitzer, James Van Gogh, Jennifer Watia, Xinyu Zhang +3 more | 2006-08-29 |
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Michael Feltsman, Allen Lau, Marc Schweitzer | 2004-12-07 |
| 6776848 | Motorized chamber lid | Alex Shenderovich, Marc Schweitzer, Ilya Lavitsky, Alvin Lau, Michael Feltsman | 2004-08-17 |
| 6730174 | Unitary removable shield assembly | Alan Liu, Ilya Lavitsky | 2004-05-04 |
| 6688838 | Cleanroom lift having an articulated arm | Ilya Lavitsky | 2004-02-10 |
| 6669829 | Shutter disk and blade alignment sensor | Michael Feltsman, Allen Lau, Marc Schweitzer | 2003-12-30 |
| 6660134 | Feedthrough overlap coil | Praburam Gopalraja, Zheng Xu, John C. Forster | 2003-12-09 |
| 6589407 | Aluminum deposition shield | Anantha K. Subramani, Ashok Das, Leif DeLaurentis | 2003-07-08 |
| D450070 | Sputtering chamber coil | Praburam Gopalraja, Zheng Xu, John C. Forster | 2001-11-06 |
| D442852 | Squared overlap coil | Praburam Gopalraja, John C. Forster | 2001-05-29 |
| D442853 | Rounded overlap coil | Praburam Gopalraja, John C. Forster | 2001-05-29 |
| 6228236 | Sputter magnetron having two rotation diameters | Jianming Fu, Leif DeLaurentis, James Van Gogh, Alan Liu | 2001-05-08 |
| 6221221 | Apparatus for providing RF return current path control in a semiconductor wafer processing system | Ayad A. Al-Shaikh, Bradley O. Stimson, Jianming Fu, Praburam Gopalraja | 2001-04-24 |
| D440582 | Sputtering chamber coil | Praburam Gopalraja, Zheng Xu, John C. Forster, Peijun Ding | 2001-04-17 |
| 5860640 | Semiconductor wafer alignment member and clamp ring | Dan Marohl | 1999-01-19 |
| 5690795 | Screwless shield assembly for vacuum processing chambers | Howard Grunes, Stephen Bruce Brodsky | 1997-11-25 |