Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7774086 | Substrate thickness measuring during polishing | Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek | 2010-08-10 |
| 7746485 | Determining physical property of substrate | Abraham Ravid, Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson +2 more | 2010-06-29 |
| 7611400 | Smart conditioner rinse station | Alpay Yilmaz | 2009-11-03 |
| 7520968 | Conductive pad design modification for better wafer-pad contact | Rashid Mavliev | 2009-04-21 |
| 7504018 | Electrochemical method for Ecmp polishing pad conditioning | You Wang, Stan Tsai, Jie Diao, Renhe Jia, Alpay Yilmaz | 2009-03-17 |
| 7444198 | Determining physical property of substrate | Abraham Ravid, Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson +2 more | 2008-10-28 |
| 7422982 | Method and apparatus for electroprocessing a substrate with edge profile control | You Wang, Jie Diao, Stan Tsai | 2008-09-09 |
| 7409260 | Substrate thickness measuring during polishing | Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek | 2008-08-05 |
| 7344432 | Conductive pad with ion exchange membrane for electrochemical mechanical polishing | Liang-Yun Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel Carl +9 more | 2008-03-18 |
| 7210981 | Smart conditioner rinse station | Alpay Yilmaz | 2007-05-01 |