Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014179 | Methods for forming cobalt-copper selective fill for an interconnect | Rong Tao, Tae Hong Ha, Xianmin Tang | 2018-07-03 |
| 9953813 | Methods and apparatus for improved metal ion filtering | Xianmin Tang, Guojun Liu | 2018-04-24 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Anantha K. Subramani, Joseph M. Ranish, Xiaoxiong Yuan, Ashish Goel | 2018-02-27 |
| 9831074 | Bipolar collimator utilized in a physical vapor deposition chamber | Guojun Liu, Wei Wang, Prashanth Kothnur | 2017-11-28 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Adolph Miller Allen +2 more | 2016-10-04 |
| 9315891 | Methods for processing a substrate using multiple substrate support positions | William Johanson, Keith A. Miller, Alan A. Ritchie | 2016-04-19 |
| 8841211 | Methods for forming interconnect structures | Xianmin Tang, Tza-Jing Gung | 2014-09-23 |
| 8476162 | Methods of forming layers on substrates | Tae Hong Ha, Winsor Lam, Tza-Jing Gung | 2013-07-02 |
| 6954042 | Three-phase BLDC motor system and circuit and method for driving three-phase BLDC motor | Ssi Chol Choi | 2005-10-11 |