Issued Patents All Time
Showing 101–118 of 118 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7727049 | Friction sensor for polishing system | Bogdan Swedek | 2010-06-01 |
| 7651385 | Polishing system with optical head | Jeffrey Drue David, Bogdan Swedek | 2010-01-26 |
| 7614936 | Spectrum based endpointing for chemical mechanical polishing | Jeffrey Drue David, Bogdan Swedek | 2009-11-10 |
| 7614933 | Polishing pad assembly with glass or crystalline window | Jeffrey Drue David, Bogdan Swedek | 2009-11-10 |
| 7547243 | Method of making and apparatus having polishing pad with window | Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, David Datong Huo | 2009-06-16 |
| 7513818 | Polishing endpoint detection system and method using friction sensor | Gabriel L. Miller, Manoocher Birang, Nils Johansson, Boguslaw A. Swedek | 2009-04-07 |
| 7444198 | Determining physical property of substrate | Abraham Ravid, Boguslaw A. Swedek, Jeffrey Drue David, Jun Qian, Ingemar Carlsson +2 more | 2008-10-28 |
| 7409260 | Substrate thickness measuring during polishing | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah | 2008-08-05 |
| 7406394 | Spectra based endpointing for chemical mechanical polishing | Boguslaw A. Swedek, Jeffrey Drue David | 2008-07-29 |
| 7306507 | Polishing pad assembly with glass or crystalline window | Jeffrey Drue David, Bogdan Swedek | 2007-12-11 |
| 7264536 | Polishing pad with window | Andreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, David Datong Huo | 2007-09-04 |
| 7226339 | Spectrum based endpointing for chemical mechanical polishing | Jeffrey Drue David, Bogdan Swedek | 2007-06-05 |
| 7210980 | Sealed polishing pad, system and methods | Bogdan Swedek, David J. Lischka, Jeffrey Drue David | 2007-05-01 |
| 7195535 | Metrology for chemical mechanical polishing | Boguslaw A. Swedek | 2007-03-27 |
| 7163437 | System with sealed polishing pad | Bogdan Swedek, David J. Lischka, Jeffrey Drue David | 2007-01-16 |
| 7120553 | Iso-reflectance wavelengths | — | 2006-10-10 |
| 7112119 | Sealed polishing pad methods | Bogdan Swedek, David J. Lischka, Jeffrey Drue David | 2006-09-26 |
| 5900130 | Method for sample injection in microchannel device | Randy M. McCormick | 1999-05-04 |