Issued Patents All Time
Showing 26–50 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084406 | Apparatus for particle removal by single-phase and two-phase media | Satish SRINIVASAN, Grant Peng, Ji Zhu, Shih-Chung Kon, Dragan Podlesnik +1 more | 2011-12-27 |
| 7967019 | Method and apparatus for removing contaminants from substrate | Ji Zhu, Arjun Mendiratta | 2011-06-28 |
| 7900027 | Scalable link stack control method with full support for speculative operations | Ronald P. Hall, Michael L. Karm, Albert J. Van Norstrand, Jr. | 2011-03-01 |
| 7877523 | Apparatus, computer program product, and system for completing a plurality of chained list DMA commands that include a fenced list DMA command element | Matthew KING, Peichum Peter Liu, Takeshi Yamazaki | 2011-01-25 |
| 7779232 | Method and apparatus for dynamically managing instruction buffer depths for non-predicted branches | Richard W. Doing, Michael O. Klett, Kevin N. Magill, Brian R. Mestan, Balaram Sinharoy +1 more | 2010-08-17 |
| 7644198 | DMAC translation mechanism | Matthew KING, Peichun Peter Lui, Jieming Qi | 2010-01-05 |
| 7529799 | Method and apparatus for transaction tag assignment and maintenance in a distributed symmetric multiprocessor system | Manuel J. Alvarez, II, Sanjay Deshpande, Kenneth D. Klapproth | 2009-05-05 |
| 7512722 | Method for completing a plurality of chained list DMA commands that include a fenced list DMA command element | Matthew KING, Peichum Peter Liu, Takeshi Yamazaki | 2009-03-31 |
| 7498106 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | Wei Liu, Hiroki Sasano | 2009-03-03 |
| 7482178 | Chamber stability monitoring using an integrated metrology tool | Wei Liu, Hiroki Sasano | 2009-01-27 |
| 7444435 | Non-fenced list DMA command mechanism | Matthew KING, Peichum Peter Liu, Takeshi Yamazaki | 2008-10-28 |
| 7262865 | Method and apparatus for controlling a calibration cycle or a metrology tool | Hiroki Sasano, Wei Liu | 2007-08-28 |
| 7250373 | Method and apparatus for etching material layers with high uniformity of a lateral etch rate across a substrate | Wei Liu | 2007-07-31 |
| 7203811 | Non-fenced list DMA command mechanism | Matthew KING, Peichum Peter Liu, Takeshi Yamazaki | 2007-04-10 |
| 7107376 | Systems and methods for bandwidth shaping | Shigehiro Asano, Peichun Peter Liu | 2006-09-12 |
| 7094613 | Method for controlling accuracy and repeatability of an etch process | Wei Liu, Hiroki Sasano | 2006-08-22 |
| 6960416 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | Wei Liu, Hiroki Sasano | 2005-11-01 |
| 6924088 | Method and system for realtime CD microloading control | Wei Liu, Shashank Deshmukh, Hiroki Sasano | 2005-08-02 |
| 6924191 | Method for fabricating a gate structure of a field effect transistor | Wei Liu, Thorsten Lill, Christopher Dennis Bencher | 2005-08-02 |
| 6911399 | Method of controlling critical dimension microloading of photoresist trimming process by selective sidewall polymer deposition | Wei Liu | 2005-06-28 |
| 6858361 | Methodology for repeatable post etch CD in a production tool | Hiroki Sasano, Wei Liu | 2005-02-22 |
| 6849151 | Monitoring substrate processing by detecting reflectively diffracted light | Michael Barnes, John Holland, Wei Liu | 2005-02-01 |
| 6822486 | Multiplexer methods and apparatus | Matthew KING, Peichun Peter Liu, Jieming Qi | 2004-11-23 |
| 6703315 | Method of providing a shallow trench in a deep-trench device | Wei Liu | 2004-03-09 |
| 6699399 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Arthur Y. Chen, Gerald Yin +5 more | 2004-03-02 |