Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6755150 | Multi-core transformer plasma source | Michael S. Cox, Peter Loewenhardt, Tsutomu Tanaka, Shamouil Shamouilian | 2004-06-29 |
| 6712020 | Toroidal plasma source for plasma processing | Michael S. Cox, Robert B. Majewski, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2004-03-30 |
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Zhengquan Tan, Steve Kim, Alexander Veyster | 2004-01-27 |
| 6450117 | Directing a flow of gas in a substrate processing chamber | Laxman Murugesh, Padmanaban Krishnaraj, Michael S. Cox, Narendra Dubey, Tom K. Cho +2 more | 2002-09-17 |
| 6447651 | High-permeability magnetic shield for improved process uniformity in nonmagnetized plasma process chambers | Tetsuya Ishikawa, Kaveh Niazi, Tsutomu Tanaka, Robert Duncan | 2002-09-10 |
| 6418874 | Toroidal plasma source for plasma processing | Michael S. Cox, Robert B. Majewski, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2002-07-16 |
| 6364958 | Plasma assisted semiconductor substrate processing chamber having a plurality of ground path bridges | Michael S. Cox, Michael Barnes, Lily Pang | 2002-04-02 |
| 5835335 | Unbalanced bipolar electrostatic chuck power supplies and methods thereof | Charles Ross | 1998-11-10 |