Issued Patents All Time
Showing 76–100 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6922595 | Selecting control algorithms based on business rules | Anastasia Oshelski Peterson | 2005-07-26 |
| 6912433 | Determining a next tool state based on fault detection information | Robert J. Chong, Alexander J. Pasadyn, Eric O. Green | 2005-06-28 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Alexander J. Pasadyn, Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson +1 more | 2005-05-31 |
| 6868512 | Fault detection system with real-time database | Elfido Coss, Jr. | 2005-03-15 |
| 6831555 | Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework | Elfido Coss, Jr. | 2004-12-14 |
| 6801817 | Method and apparatus for integrating multiple process controllers | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-10-05 |
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Thomas J. Sonderman, Christopher A. Bode, Alexander J. Pasadyn, Joyce S. Oey Hewett +1 more | 2004-08-31 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Jin Wang, Elfido Coss, Jr., Brian K. Cusson, Alexander J. Pasadyn, Naomi M. Jenkins +1 more | 2004-08-17 |
| 6706541 | Method and apparatus for controlling wafer uniformity using spatially resolved sensors | Anthony J. Toprac | 2004-03-16 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Joyce S. Oey Hewett, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2004-03-02 |
| 6697691 | Method and apparatus for fault model analysis in manufacturing tools | Terrence J. Riley, Qingsu Wang | 2004-02-24 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Alexander J. Pasadyn, Anthony J. Toprac, Christopher A. Bode, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-01-06 |
| 6643557 | Method and apparatus for using scatterometry to perform feedback and feed-forward control | Anthony J. Toprac | 2003-11-04 |
| 6640148 | Method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework | Elfido Coss, Jr. | 2003-10-28 |
| 6629012 | Wafer-less qualification of a processing tool | Terrence J. Riley, Qingsu Wang, Michael R. Conboy, W. Jarrett Campbell | 2003-09-30 |
| 6622059 | Automated process monitoring and analysis system for semiconductor processing | Anthony J. Toprac | 2003-09-16 |
| 6615098 | Method and apparatus for controlling a tool using a baseline control script | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2003-09-02 |
| 6600985 | Roll sensor system for a vehicle | Ralph M. Weaver | 2003-07-29 |
| 6556881 | Method and apparatus for integrating near real-time fault detection in an APC framework | — | 2003-04-29 |
| 6556884 | Method and apparatus for interfacing a statistical process control system with a manufacturing process control framework | Anatasia L. Oshelski, William J. Campbell | 2003-04-29 |
| 6556959 | Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers | Qingsu Wang | 2003-04-29 |
| 6535783 | Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework | Scott Bushman | 2003-03-18 |
| 6532555 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Qingsu Wang, Elfido Coss, Jr. | 2003-03-11 |
| 6511452 | Tampon applicator with improved fingergrip | Jamshid Rejai, Robert C. Norquest | 2003-01-28 |
| 6470230 | Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication | Anthony J. Toprac, Thomas J. Sonderman | 2002-10-22 |