Issued Patents All Time
Showing 176–190 of 190 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6196734 | CD uniformity by active control of developer temperature | Michael K. Templeton | 2001-03-06 |
| 6191036 | Use of photoresist focus exposure matrix array as via etch monitor | Allen S. Yu, Paul J. Steffan | 2001-02-20 |
| 6190062 | Cleaning chamber built into SEM for plasma or gaseous phase cleaning | Ramkumar Subramanian, Khoi A. Phan, Bhanwar Singh, Bryan K. Choo, Sanjay K. Yedur | 2001-02-20 |
| 6191046 | Deposition of an oxide layer to facilitate photoresist rework on polygate layer | Bhanwar Singh, Sanjay K. Yedur | 2001-02-20 |
| 6187666 | CVD plasma process to fill contact hole in damascene process | Bhanwar Singh, Michael K. Templeton, Christopher F. Lyons, Sanjay K. Yedur, Ramkumar Subramanian | 2001-02-13 |
| 6168993 | Process for fabricating a semiconductor device having a graded junction | David K. Foote, George J. Kluth, Fei Wang | 2001-01-02 |
| 6153504 | Method of using a silicon oxynitride ARC for final metal layer | Jeffrey A. Shields | 2000-11-28 |
| 6136514 | Resist developer saving system using material to reduce surface tension and wet resist surface | Khoi A. Phan, Ramkumar Subramanian, Bhanwar Singh | 2000-10-24 |
| 6127259 | Phosphoric acid process for removal of contact BARC layer | Jeffrey A. Shields | 2000-10-03 |
| 6117618 | Carbonized antireflective coating produced by spin-on polymer material | Sanjay K. Yedur, Bhanwar Singh, Michael K. Templeton | 2000-09-12 |
| 6099783 | Photopolymerizable compositions for encapsulating microelectronic devices | Alec B. Scranton, Kiran Baikerikar | 2000-08-08 |
| 6063531 | Focus monitor structure and method for lithography process | Bhanwar Singh, Khoi A. Phan, Carmen Morales | 2000-05-16 |
| 6057914 | Method for detecting and identifying a lens aberration by measurement of sidewall angles by atomic force microscopy | Sanjay K. Yedur, Bhanwar Singh | 2000-05-02 |
| 6034771 | System for uniformly heating photoresist | Bhanwar Singh, Sanjay K. Yedur, Michael K. Templeton | 2000-03-07 |
| 5855837 | Thick, composite parts made from photopolymerizable compositions and methods for making such parts | Alec B. Scranton, Lindsay S. Coons | 1999-01-05 |