Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429328 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2025-09-30 |
| 12411421 | Metrology apparatus based on high harmonic generation and associated method | Peter Michael KRAUS, Sylvianne Dorothea Christina ROSCAM ABBING, Filippo CAMPI, ZhuangYan ZHANG, Petrus Wilhelmus SMORENBURG +2 more | 2025-09-09 |
| 12399434 | Method of determining a characteristic of a structure, and metrology apparatus | Johannes F. de Boer, Vasco Tomas Tenner, Christos MESSINIS | 2025-08-26 |
| 12393046 | Metrology systems, coherence scrambler illumination sources and methods thereof | Irwan Dani Setija, Mohamed Swillam, Arjan Johannes Anton Beukman | 2025-08-19 |
| 12366811 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2025-07-22 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12306544 | Metrology tool with position control of projection system | Hans Butler, Mark Constant Johannes Baggen, Jeroen Arnoldus Leonardus Johannes Raaymakers, Richard Carl Zimmerman | 2025-05-20 |
| 12235096 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2025-02-25 |
| 12189305 | Metrology method and apparatus and computer program | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Kaustuve Bhattacharyya, Samee Ur Rehman | 2025-01-07 |