Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429328 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Arie Jeffrey Den Boef +7 more | 2025-09-30 |
| 12321101 | Method for applying a deposition model in a semiconductor manufacturing process | Maxim PISARENCO, Huaichen ZHANG, Marie-Claire VAN LARE | 2025-06-03 |
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif, Henricus Wilhelmus Maria Van Buel +6 more | 2025-04-15 |
| 12242203 | Target for measuring a parameter of a lithographic process | Patrick Warnaar, Franciscus Godefridus Casper Bijnen, Olger Victor Zwier | 2025-03-04 |
| 12204826 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Martin Ebert +5 more | 2025-01-21 |