Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif, Henricus Wilhelmus Maria Van Buel +6 more | 2025-04-15 |
| 12242203 | Target for measuring a parameter of a lithographic process | Maurits Van Der Schaar, Patrick Warnaar, Franciscus Godefridus Casper Bijnen | 2025-03-04 |