Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12282263 | Metrology system and lithographic system | Sebastianus Adrianus GOORDEN | 2025-04-22 |