Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339588 | High force low voltage piezoelectric micromirror actuator | Luc Haspeslagh, Nitesh Pandey, Ties Wouter VAN DER WOORD, Halil Gökay YEGEN, Guilherme Brondani Torri +3 more | 2025-06-24 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Nitish Kumar, Jin LIAN +1 more | 2025-06-10 |
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Stephen Roux, Sergei Sokolov, Filippo ALPEGGIANI | 2025-04-29 |
| 12287470 | Dark field microscope | — | 2025-04-29 |
| 12282263 | Metrology system and lithographic system | Simon Reinald HUISMAN | 2025-04-22 |
| 12276784 | Micromirror arrays | Luc Haspeslagh, Veronique Rochus, Guilherme Brondani Torri, Nitesh Pandey | 2025-04-15 |
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif +6 more | 2025-04-15 |
| 12259546 | Micromirror arrays | Alexandre Halbach, Nitesh Pandey, Veronique Rochus, Luc Haspeslagh, Guilherme Brondani Torri | 2025-03-25 |
| 12189314 | Metrology method and associated metrology and lithographic apparatuses | Simon Gijsbert Josephus Mathijssen, Leendert Jan KARSSEMEIJER, Manouk RIJPSTRA, Ralph Brinkhof, Kaustuve Bhattacharyya | 2025-01-07 |