Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399000 | Systems and methods for measuring intensity in a lithographic alignment apparatus | Mohamed Swillam, Justin Kreuzer, Michael L. Nelson, Muhsin Eralp | 2025-08-26 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Arjan Johannes Anton Beukman, Mohamed Swillam, Justin Kreuzer | 2025-05-13 |
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Sergei Sokolov, Filippo ALPEGGIANI | 2025-04-29 |
| 12216414 | Self-referencing integrated alignment sensor | Mohamed Swillam, Justin Kreuzer | 2025-02-04 |