Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405227 | Method for region of interest processing for reticle particle detection | Peter Kochersperger, Christopher Michael DOHAN, Michal Emanuel Pawlowski, Aage Bendiksen, Kirill Urievich SOBOLEV +3 more | 2025-09-02 |
| 12405535 | Method for filtering an image and associated metrology apparatus | Armand Eugene Albert Koolen, Nikhil Mehta, Patrick Warnaar, Vasco Tomas Tenner, Patricius Aloysius Jacobus Tinnemans +1 more | 2025-09-02 |
| 12399000 | Systems and methods for measuring intensity in a lithographic alignment apparatus | Mohamed Swillam, Stephen Roux, Michael L. Nelson, Muhsin Eralp | 2025-08-26 |
| 12379655 | Contaminant identification metrology system, lithographic apparatus, and methods thereof | Andrew Judge, Ravi Chaitanya Kalluri, Michal Emanuel Pawlowski, James H. Walsh | 2025-08-05 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Arjan Johannes Anton Beukman, Mohamed Swillam, Stephen Roux | 2025-05-13 |
| 12216414 | Self-referencing integrated alignment sensor | Mohamed Swillam, Stephen Roux | 2025-02-04 |