Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399000 | Systems and methods for measuring intensity in a lithographic alignment apparatus | Justin Kreuzer, Stephen Roux, Michael L. Nelson, Muhsin Eralp | 2025-08-26 |
| 12393046 | Metrology systems, coherence scrambler illumination sources and methods thereof | Irwan Dani Setija, Arie Jeffrey Den Boef, Arjan Johannes Anton Beukman | 2025-08-19 |
| 12306541 | Lithographic apparatus, metrology systems, illumination switches and methods thereof | Marinus Petrus REIJNDERS | 2025-05-20 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Arjan Johannes Anton Beukman, Justin Kreuzer, Stephen Roux | 2025-05-13 |
| 12216414 | Self-referencing integrated alignment sensor | Justin Kreuzer, Stephen Roux | 2025-02-04 |