Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Stephen Roux, Sergei Sokolov | 2025-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287591 | Lithographic apparatus, metrology systems, and methods thereof | Arjan Johannes Anton Beukman, Sebastianus Adrianus GOORDEN, Stephen Roux, Sergei Sokolov | 2025-04-29 |