Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346031 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Fei Liu, Zhuangxiong HUANG, Laurentius Cornelius De Winter, Frank Staals | 2025-07-01 |
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar +1 more | 2025-06-10 |
| 12276921 | Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method | Olger Victor Zwier, Maurits Van Der Schaar, Hilko Dirk Bos, Hans Van Der Laan, S. M. Masudur Rahman Al Arif +6 more | 2025-04-15 |