Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346031 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Fei Liu, Jin LIAN, Zhuangxiong HUANG, Laurentius Cornelius De Winter | 2025-07-01 |
| 12287582 | Method for controlling a lithographic apparatus and associated apparatuses | Simon Hendrik Celine Van Gorp | 2025-04-29 |
| 12197136 | Method of determining control parameters of a device manufacturing process | Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Abraham SLACHTER +3 more | 2025-01-14 |