Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346031 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Fei Liu, Jin LIAN, Zhuangxiong HUANG, Frank Staals | 2025-07-01 |
| 12271008 | Transmissive diffusor | Andrey Nikipelov, Marcus Adrianus Van De Kerkhof, Pieter-Jan Van Zwol, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV | 2025-04-08 |