Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298663 | Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle | Mária Péter, Erik Achilles Abegg, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Maxim Aleksandrovich Nasalevich +5 more | 2025-05-13 |
| 12271008 | Transmissive diffusor | Andrey Nikipelov, Marcus Adrianus Van De Kerkhof, Laurentius Cornelius De Winter, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV | 2025-04-08 |