Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298663 | Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle | Mária Péter, Erik Achilles Abegg, Johan Hendrik Klootwijk, Maxim Aleksandrovich Nasalevich, Wilhelmus Theodorus Anthonius Johannes Van Den Einden +5 more | 2025-05-13 |