Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more | 2025-06-17 |
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Alexey Olegovich POLYAKOV, Erwin Paul SMAKMAN, Albertus Victor Gerardus MANGNUS | 2025-05-27 |
| 12271008 | Transmissive diffusor | Marcus Adrianus Van De Kerkhof, Pieter-Jan Van Zwol, Laurentius Cornelius De Winter, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV | 2025-04-08 |