Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Alexey Olegovich POLYAKOV, Andrey Nikipelov, Albertus Victor Gerardus MANGNUS | 2025-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Alexey Olegovich POLYAKOV, Andrey Nikipelov, Albertus Victor Gerardus MANGNUS | 2025-05-27 |