Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422387 | Charged particle optical device, objective lens assembly, detector, detector array, and methods | Marco Jan-Jaco Wieland | 2025-09-23 |
| 12394589 | Charged particle device, detector, and methods | Erwin Slot | 2025-08-19 |
| 12325911 | Method and apparatus for forming a patterned layer of material | Tamara Druzhinina, Jim Vincent Overkamp, Alexey Olegovich POLYAKOV, Teis Johan Coenen, Evgenia KURGANOVA +4 more | 2025-06-10 |
| 12313980 | Inspection system, lithographic apparatus, and inspection method | Alexey Olegovich POLYAKOV, Erwin Paul SMAKMAN, Andrey Nikipelov | 2025-05-27 |
| 12230469 | Apparatus for and method of local control of a charged particle beam | Maikel Robert GOOSEN | 2025-02-18 |