Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422759 | Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus | — | 2025-09-23 |
| 12372888 | Patterning device conditioning system and method | Ferdinandus Martinus Jozef Henricus Van De Wetering, Andrei Mikhailovich Yakunin | 2025-07-29 |
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more | 2025-06-17 |
| 12287455 | Oxygen-loss resistant top coating for optical elements | Yue Ma, Qiushi Zhu, Klaus Hummler, Peter Matthew Mayer, Kay Hoffmann +3 more | 2025-04-29 |
| 12276815 | EUV collector mirror | — | 2025-04-15 |
| 12271008 | Transmissive diffusor | Andrey Nikipelov, Pieter-Jan Van Zwol, Laurentius Cornelius De Winter, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV | 2025-04-08 |
| 12249480 | Fluid transfer system in a charged particle system | Jing Zhang, Martijn Petrus Christianus Van Heumen, Patriek Adrianus Alphonsus Maria Bruurs, Erheng WANG, Vineet Sharma +4 more | 2025-03-11 |
| 12235592 | Object holder, electrostatic sheet and method for making an electrostatic sheet | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koos Van Berkel, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin, Marinus Augustinus Christiaan Verschuren +7 more | 2025-02-25 |