Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411421 | Metrology apparatus based on high harmonic generation and associated method | Peter Michael KRAUS, Filippo CAMPI, ZhuangYan ZHANG, Petrus Wilhelmus SMORENBURG, Nan Lin +2 more | 2025-09-09 |