Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411421 | Metrology apparatus based on high harmonic generation and associated method | Peter Michael KRAUS, Sylvianne Dorothea Christina ROSCAM ABBING, Filippo CAMPI, ZhuangYan ZHANG, Nan Lin +2 more | 2025-09-09 |
| 12196688 | Method and apparatus for efficient high harmonic generation | — | 2025-01-14 |