| 11177128 |
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer |
Abhijit Basu Mallick, Kurtis Leschkies, Steven Verhaverbeke, Shishi Jiang |
2021-11-16 |
| 11158507 |
In-situ high power implant to relieve stress of a thin film |
Eswaranand Venkatasubramanian, Abhijit Basu Mallick, Srinivas Gandikota |
2021-10-26 |
| 11131015 |
High pressure oxidation of metal films |
Amrita B. Mullick, Abhijit Basu Mallick |
2021-09-28 |
| 11062939 |
High bias deposition of high quality gapfill |
Samuel E. Gottheim, Eswaranand Venkatasubramanian, Abhijit Basu Mallick |
2021-07-13 |
| 11043372 |
High-density low temperature carbon films for hardmask and other patterning applications |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa +2 more |
2021-06-22 |
| 11043379 |
Conformal carbon film deposition |
Abhijit Basu Mallick |
2021-06-22 |
| 11028477 |
Bottom-up gap-fill by surface poisoning treatment |
Mark Saly, Keiichi Tanaka, Eswaranand Venkatasubramanian, Mandyam Sriram, Bhaskar Jyoti Bhuyan +2 more |
2021-06-08 |
| 11011384 |
Gapfill using reactive anneal |
Abhijit Basu Mallick, Shishi Jiang |
2021-05-18 |
| 10954129 |
Diamond-like carbon as mandrel |
Takehito Koshizawa, Eswaranand Venkatasubramanian, Chi-Pin Lu, Chi-I Lang, Nancy Fung +1 more |
2021-03-23 |
| 10950498 |
Selective and self-limiting tungsten etch process |
Susmit Singha Roy, Srinivas Gandikota, Abhijit Basu Mallick |
2021-03-16 |
| 10910381 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more |
2021-02-02 |
| 10886140 |
3D NAND etch |
Shishi Jiang, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more |
2021-01-05 |
