Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more | 2021-12-14 |
| 11133210 | Dual temperature heater | Dale R. Du Bois, Sanjeev Baluja, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more | 2021-09-28 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 11004663 | Chamber design for semiconductor processing | Dale R. Du Bois, Amit Kumar BANSAL | 2021-05-11 |
| 10971389 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Ramprakash Sankarakrishnan | 2021-04-06 |
| 10950477 | Ceramic heater and esc with enhanced wafer edge performance | Xing Lin, Jianhua Zhou, Zheng John Ye, Jian J. Chen | 2021-03-16 |
| 10916407 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Mohamad A. Ayoub, Jay D. Pinson, II | 2021-02-09 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2021-02-02 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche +3 more | 2021-02-02 |