Issued Patents 2020
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879042 | Symmetric plasma source to generate pie shaped treatment | Anantha K. Subramani, Farzad Houshmand, Abhishek Chowdhury, John C. Forster, Kallol Bera | 2020-12-29 |
| 10840086 | Plasma enhanced CVD with periodic high voltage bias | Kelvin Chan, Travis Koh, Simon Huang | 2020-11-17 |
| 10830756 | Method to create a free-standing membrane for biological applications | Ankit Vora, Kenichi Ohno, Zohreh Hesabi, Joseph R. Johnson | 2020-11-10 |
| 10811296 | Substrate support with dual embedded electrodes | Jaeyong Cho | 2020-10-20 |
| 10790175 | Selective etch rate monitor | Timothy Joseph Franklin | 2020-09-29 |
| 10763143 | Processing tool having a monitoring device | Shimin Mao, Simon Huang, Ashish Goel, Anantha K. Subramani | 2020-09-01 |
| 10763150 | System for coupling a voltage to spatially segmented portions of the wafer with variable voltage | Roger Alan Lindley, Thai Cheng Chua | 2020-09-01 |
| 10752496 | Pore formation in a substrate | Joseph R. Johnson | 2020-08-25 |
| 10748745 | Modular microwave plasma source | Thai Cheng Chua | 2020-08-18 |
| 10720311 | Phased array modular high-frequency source | Thai Cheng Chua, Christian Amormino, Dmitry A. Dzilno | 2020-07-21 |
| 10714372 | System for coupling a voltage to portions of a substrate | Thai Cheng Chua, Travis Koh, Christian Amormino, Jaeyong Cho | 2020-07-14 |
| 10707058 | Symmetric and irregular shaped plasmas using modular microwave sources | Thai Cheng Chua, Farzad Houshmand, Christian Amormino | 2020-07-07 |
| 10685807 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Rajinder Dhindsa +1 more | 2020-06-16 |
| 10607817 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Steven E. Babayan | 2020-03-31 |
| 10597785 | Single oxide metal deposition chamber | Anantha K. Subramani, Praburam Gopalraja, Tza-Jing Gung, Hari Ponnekanti | 2020-03-24 |
| 10546698 | Structure for electric energy storage using carbon nanotubes | Cattien V. Nguyen, You Li, Hoang Nguyen Ly, Darrell L. Niemann, Bevan Vo | 2020-01-28 |