Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Kai Wu +4 more | 2020-12-29 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| 10640870 | Gas feedthrough assembly | Daping Yao, Hyman Lam, Jiang Lu, Dien-Yeh Wu, Can Xu +1 more | 2020-05-05 |
| 10600685 | Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film | Daping Yao, Jiang Lu, Can Xu, Paul F. Ma | 2020-03-24 |
| 10553425 | Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD | Jessica S. Kachian, Naomi Yoshida, Mary Edmonds, Andrew C. Kummel, Sang Wook Park +1 more | 2020-02-04 |
| 10535527 | Methods for depositing semiconductor films | Yi Xu, Takashi Kuratomi, Avgerinos V. Gelatos, Vikash Banthia, Kazuya Daito | 2020-01-14 |