Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553425 | Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD | Naomi Yoshida, Mei Chang, Mary Edmonds, Andrew C. Kummel, Sang Wook Park +1 more | 2020-02-04 |