Issued Patents 2018
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10152678 | System, method and computer program product for combining raw data from multiple metrology tools | Thaddeus Gerard Dziura, Andrei V. Shchegrov | 2018-12-11 |
| 10152654 | Signal response metrology for image based overlay measurements | — | 2018-12-11 |
| 10151986 | Signal response metrology based on measurements of proxy structures | Andrei V. Shchegrov, Thaddeus Gerard Dziura, Leonid Poslavsky | 2018-12-11 |
| 10139352 | Measurement of small box size targets | Wei Lu, Andrei V. Shchegrov, Pablo I. Rovira, Jonathan M. Madsen | 2018-11-27 |
| 10107765 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Noam Sapiens, Andrei V. Shchegrov | 2018-10-23 |
| 10101674 | Methods and apparatus for determining focus | — | 2018-10-16 |
| 10101670 | Statistical model-based metrology | Jonathan M. Madsen | 2018-10-16 |
| 10101676 | Spectroscopic beam profile overlay metrology | Jiyou Fu, Noam Sapiens, Kevin Peterlinz | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Jiyou Fu, Noam Sapiens, Kevin Peterlinz | 2018-09-11 |
| 10062157 | Compressive sensing for metrology | Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens, John J. Hench | 2018-08-28 |
| 10030965 | Model-based hot spot monitoring | Sanjay Kapasi, Mark D. Smith, Ady Levy | 2018-07-24 |
| 9934353 | Focus measurements using scatterometry metrology | Mohamed El Kodadi, Nuriel Amir, Roie Volkovich, Vladimir Levinski, Yoel Feler +3 more | 2018-04-03 |
| 9875946 | On-device metrology | Andrei V. Shchegrov, Jonathan M. Madsen, Ady Levy, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |