Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151986 | Signal response metrology based on measurements of proxy structures | Andrei V. Shchegrov, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2018-12-11 |
| 10088413 | Spectral matching based calibration | Hidong Kwak, Zhiming Jiang, Ward Dixon, Kenneth Edward James, Jr., Torsten R. Kaack | 2018-10-02 |
| 10079183 | Calculated electrical performance metrics for process monitoring and yield management | Xiang Gao, Philip D. Flanner, III, Ming Di, Qiang Zhao, Scott Penner | 2018-09-18 |
| 10006865 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Michael S. Bakeman, Guorong V. Zhuang, Andrei V. Shchegrov | 2018-06-26 |
| 9915522 | Optimized spatial modeling for optical CD metrology | Peilin Jiang | 2018-03-13 |
| 9903711 | Feed forward of metrology data in a metrology system | Ady Levy, Daniel Kandel, Michael Adel, John Robinson, Tal Marciano +9 more | 2018-02-27 |
| 9857291 | Metrology system calibration refinement | Hidong Kwak, John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan +1 more | 2018-01-02 |