Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10030965 | Model-based hot spot monitoring | Stilian Ivanov Pandev, Sanjay Kapasi, Mark D. Smith | 2018-07-24 |
| 10024654 | Method and system for determining in-plane distortions in a substrate | Mark D. Smith, Jose Solomon, Stuart Sherwin, Walter D. Mieher | 2018-07-17 |
| 9903711 | Feed forward of metrology data in a metrology system | Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson, Tal Marciano +9 more | 2018-02-27 |
| 9875946 | On-device metrology | Andrei V. Shchegrov, Jonathan M. Madsen, Stilian Ivanov Pandev, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |