Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Yuri Paskover, Amnon Manassen, Andrew V. Hill | 2018-11-27 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-11-13 |
| 10101592 | Self-moiré target design principles for measuring unresolved device-like pitches | Vladimir Levinski, Yuri Paskover | 2018-10-16 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-05-01 |
| 9934353 | Focus measurements using scatterometry metrology | Mohamed El Kodadi, Nuriel Amir, Roie Volkovich, Vladimir Levinski, Yoel Feler +3 more | 2018-04-03 |
| 9927718 | Multi-layer overlay metrology target and complimentary overlay metrology measurement systems | Vladimir Levinski, Guy M. Cohen | 2018-03-27 |
| 9903711 | Feed forward of metrology data in a metrology system | Ady Levy, Michael Adel, Leonid Poslavsky, John Robinson, Tal Marciano +9 more | 2018-02-27 |
| 9875946 | On-device metrology | Andrei V. Shchegrov, Jonathan M. Madsen, Stilian Ivanov Pandev, Ady Levy, Michael Adel +1 more | 2018-01-23 |
| 9869543 | Reducing algorithmic inaccuracy in scatterometry overlay metrology | Barak Bringoltz, Mark Ghinovker, Vladimir Levinski, Zeev Bomzon | 2018-01-16 |
| 9864209 | Self-moire target design principles for measuring unresolved device-like pitches | Vladimir Levinski, Yuri Paskover | 2018-01-09 |