| 10139528 |
Compound objectives for imaging and scatterometry overlay |
Joel Seligson, Vladimir Levinski, Yuri Paskover, Amnon Manassen, Andrew V. Hill |
2018-11-27 |
| 10126238 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology |
Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz |
2018-11-13 |
| 10101592 |
Self-moiré target design principles for measuring unresolved device-like pitches |
Vladimir Levinski, Yuri Paskover |
2018-10-16 |
| 9958385 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology |
Amnon Manassen, Andrew V. Hill, Ilan Sela, Ohad Bachar, Barak Bringoltz |
2018-05-01 |
| 9934353 |
Focus measurements using scatterometry metrology |
Mohamed El Kodadi, Nuriel Amir, Roie Volkovich, Vladimir Levinski, Yoel Feler +3 more |
2018-04-03 |
| 9927718 |
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems |
Vladimir Levinski, Guy M. Cohen |
2018-03-27 |
| 9903711 |
Feed forward of metrology data in a metrology system |
Ady Levy, Michael Adel, Leonid Poslavsky, John Robinson, Tal Marciano +9 more |
2018-02-27 |
| 9875946 |
On-device metrology |
Andrei V. Shchegrov, Jonathan M. Madsen, Stilian Ivanov Pandev, Ady Levy, Michael Adel +1 more |
2018-01-23 |
| 9869543 |
Reducing algorithmic inaccuracy in scatterometry overlay metrology |
Barak Bringoltz, Mark Ghinovker, Vladimir Levinski, Zeev Bomzon |
2018-01-16 |
| 9864209 |
Self-moire target design principles for measuring unresolved device-like pitches |
Vladimir Levinski, Yuri Paskover |
2018-01-09 |