Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Daniel Kandel, Ilan Sela, Ohad Bachar | 2018-11-13 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Daniel Kandel, Ilan Sela, Ohad Bachar | 2018-05-01 |
| 9909982 | Pupil plane calibration for scatterometry overlay measurement | Irina Vakshtein, Ofir Aharon, Guy Ben Dov, Zeev Bomzon | 2018-03-06 |
| 9903711 | Feed forward of metrology data in a metrology system | Ady Levy, Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson +9 more | 2018-02-27 |
| 9874527 | Removing process-variation-related inaccuracies from scatterometry measurements | Eran Amit, Zeev Bomzon, Boris Efraty | 2018-01-23 |
| 9869543 | Reducing algorithmic inaccuracy in scatterometry overlay metrology | Mark Ghinovker, Daniel Kandel, Vladimir Levinski, Zeev Bomzon | 2018-01-16 |