Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Yuri Paskover, Amnon Manassen, Daniel Kandel | 2018-11-27 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-11-13 |
| 10048132 | Simultaneous capturing of overlay signals from multiple targets | Amnon Manassen, Yuri Paskover, Yuval Lubashevsky | 2018-08-14 |
| 10018560 | System and method for hyperspectral imaging metrology | — | 2018-07-10 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-05-01 |
| 9921050 | Spectral control system | Amnon Manassen, Ohad Bachar, Avi Abramov, Daria Negri | 2018-03-20 |
| 9886764 | Image acquisition system, image acquisition method, and inspection system | Guoheng Zhao, Stanley Stokowski, Johan De Greeve, Maarten J. van der Burgt, Karel Van Gils | 2018-02-06 |