Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Amnon Manassen, Daniel Kandel, Andrew V. Hill | 2018-11-27 |
| 10101592 | Self-moiré target design principles for measuring unresolved device-like pitches | Vladimir Levinski, Daniel Kandel | 2018-10-16 |
| 10048132 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Amnon Manassen, Yuval Lubashevsky | 2018-08-14 |
| 9864209 | Self-moire target design principles for measuring unresolved device-like pitches | Vladimir Levinski, Daniel Kandel | 2018-01-09 |