Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Vladimir Levinski, Yuri Paskover, Daniel Kandel, Andrew V. Hill | 2018-11-27 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Andrew V. Hill, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-11-13 |
| 10048132 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Yuri Paskover, Yuval Lubashevsky | 2018-08-14 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Andrew V. Hill, Daniel Kandel, Ilan Sela, Ohad Bachar, Barak Bringoltz | 2018-05-01 |
| 9921050 | Spectral control system | Andrew V. Hill, Ohad Bachar, Avi Abramov, Daria Negri | 2018-03-20 |