Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139528 | Compound objectives for imaging and scatterometry overlay | Joel Seligson, Yuri Paskover, Amnon Manassen, Daniel Kandel, Andrew V. Hill | 2018-11-27 |
| 10101592 | Self-moiré target design principles for measuring unresolved device-like pitches | Yuri Paskover, Daniel Kandel | 2018-10-16 |
| 9934353 | Focus measurements using scatterometry metrology | Mohamed El Kodadi, Nuriel Amir, Roie Volkovich, Yoel Feler, Daniel Kandel +3 more | 2018-04-03 |
| 9927718 | Multi-layer overlay metrology target and complimentary overlay metrology measurement systems | Daniel Kandel, Guy M. Cohen | 2018-03-27 |
| 9869543 | Reducing algorithmic inaccuracy in scatterometry overlay metrology | Barak Bringoltz, Mark Ghinovker, Daniel Kandel, Zeev Bomzon | 2018-01-16 |
| 9864209 | Self-moire target design principles for measuring unresolved device-like pitches | Yuri Paskover, Daniel Kandel | 2018-01-09 |