Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025285 | On-product derivation and adjustment of exposure parameters in a directed self-assembly process | Roie Volkovich, Eran Amit, Michael Adel | 2018-07-17 |
| 10008364 | Alignment of multi-beam patterning tool | — | 2018-06-26 |
| 10002806 | Metrology targets with filling elements that reduce inaccuracies and maintain contrast | Raviv Yohanan | 2018-06-19 |
| 9934353 | Focus measurements using scatterometry metrology | Mohamed El Kodadi, Roie Volkovich, Vladimir Levinski, Yoel Feler, Daniel Kandel +3 more | 2018-04-03 |
| 9903813 | Overlay measurement of pitch walk in multiply patterned targets | — | 2018-02-27 |
| 9903711 | Feed forward of metrology data in a metrology system | Ady Levy, Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson +9 more | 2018-02-27 |
| 9885961 | Partly disappearing targets | — | 2018-02-06 |