Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9909982 | Pupil plane calibration for scatterometry overlay measurement | Barak Bringoltz, Irina Vakshtein, Ofir Aharon, Guy Ben Dov | 2018-03-06 |
| 9874527 | Removing process-variation-related inaccuracies from scatterometry measurements | Eran Amit, Barak Bringoltz, Boris Efraty | 2018-01-23 |
| 9869543 | Reducing algorithmic inaccuracy in scatterometry overlay metrology | Barak Bringoltz, Mark Ghinovker, Daniel Kandel, Vladimir Levinski | 2018-01-16 |