Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9909982 | Pupil plane calibration for scatterometry overlay measurement | Barak Bringoltz, Ofir Aharon, Guy Ben Dov, Zeev Bomzon | 2018-03-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9909982 | Pupil plane calibration for scatterometry overlay measurement | Barak Bringoltz, Ofir Aharon, Guy Ben Dov, Zeev Bomzon | 2018-03-06 |